JPH0730288Y2 - 光マーカー - Google Patents

光マーカー

Info

Publication number
JPH0730288Y2
JPH0730288Y2 JP6201789U JP6201789U JPH0730288Y2 JP H0730288 Y2 JPH0730288 Y2 JP H0730288Y2 JP 6201789 U JP6201789 U JP 6201789U JP 6201789 U JP6201789 U JP 6201789U JP H0730288 Y2 JPH0730288 Y2 JP H0730288Y2
Authority
JP
Japan
Prior art keywords
light
half mirror
optical
mirror
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6201789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH031780U (en]
Inventor
誠勝 川端
Original Assignee
大洋エレックス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大洋エレックス株式会社 filed Critical 大洋エレックス株式会社
Priority to JP6201789U priority Critical patent/JPH0730288Y2/ja
Publication of JPH031780U publication Critical patent/JPH031780U/ja
Application granted granted Critical
Publication of JPH0730288Y2 publication Critical patent/JPH0730288Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP6201789U 1989-05-29 1989-05-29 光マーカー Expired - Lifetime JPH0730288Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6201789U JPH0730288Y2 (ja) 1989-05-29 1989-05-29 光マーカー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6201789U JPH0730288Y2 (ja) 1989-05-29 1989-05-29 光マーカー

Publications (2)

Publication Number Publication Date
JPH031780U JPH031780U (en]) 1991-01-09
JPH0730288Y2 true JPH0730288Y2 (ja) 1995-07-12

Family

ID=31590787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6201789U Expired - Lifetime JPH0730288Y2 (ja) 1989-05-29 1989-05-29 光マーカー

Country Status (1)

Country Link
JP (1) JPH0730288Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024116663A1 (ja) * 2022-11-29 2024-06-06 川崎重工業株式会社 罫書用治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024116663A1 (ja) * 2022-11-29 2024-06-06 川崎重工業株式会社 罫書用治具

Also Published As

Publication number Publication date
JPH031780U (en]) 1991-01-09

Similar Documents

Publication Publication Date Title
US6611343B1 (en) Method and device for 3D measurement
KR920016864A (ko) 마스크 패턴을 반복적으로 영상화하는 방법 및 그 장치
CN113945366B (zh) 光源和辐射源的光辐射特性的光度表征方法
SE420353B (sv) Anordning for att kontrollera mattriktighet
US20070058175A1 (en) Method and apparatus for 3-dimensional measurement of the surface of an object
KR20100138795A (ko) 두께변화 측정장치, 이를 이용한 시스템, 이를 이용한 표면 현미경, 두께변화 측정방법 및 이를 이용한 표면 이미지 획득방법
JPH0730288Y2 (ja) 光マーカー
US3323408A (en) Optical alignment system
US4032158A (en) Method and apparatus for indicating angular displacement
TW201245901A (en) Lithographic apparatus, method for measuring radiation beam spot position, device manufacturing method, and radiation detector system for a lithographic apparatus
US4115008A (en) Displacement measuring apparatus
JP2024515758A (ja) マルチセクションシャフト製品測定装置およびその使用方法
KR20120075038A (ko) 노광장치 및 노광장치의 정렬 방법
JPS623280A (ja) 回折格子露光装置
JP3836408B2 (ja) 位置調整装置
JPH0827176B2 (ja) 光マーカー
JPH09189545A (ja) 距離測定装置
JP3651123B2 (ja) 位置計測装置及びパターン測定装置
JPH08233524A (ja) 多軸位置決めユニット
JPH0748044B2 (ja) ステップゲージの測定装置
JPH04113201A (ja) 測長装置
SU1165882A1 (ru) Устройство дл контрол пр молинейности
SU1566206A1 (ru) Устройство дл дистанционного измерени угловых отклонений объекта
KR100380133B1 (ko) 광센서에서 피측정물의 반사광 강도에 따른 오차 보상방법
JPH10242248A (ja) 移動ステージの位置測定方法と装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term